PZT MMIC via hole fabrication technique / Raudah Abu Bakar

This study is carried out in order to investigate the effects of via hole grounding in newly proposed high dielectric constant material, lead zirconate titanate (PZT) thin films for MMIC applications. To predict the performance of via hole in PZT thin films, 50 x 50 ^im2 square and cylindrical vias...

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Bibliographic Details
Main Author: Abu Bakar, Raudah
Format: Thesis
Language:English
Published: 2010
Subjects:
Online Access:https://ir.uitm.edu.my/id/eprint/39530/1/39530.pdf
https://ir.uitm.edu.my/id/eprint/39530/
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