Application of VACNTs in MEMS devices

• Main Authors: MRazib, MAsyraf, Rana, M. M., Hassan, M. A., Saleh, Tanveer
• Format: Conference or Workshop Item
• Language: English; English; English
• Published: 2015
• Subjects: T Technology (General)
• Online Access: http://irep.iium.edu.my/46212/1/Application_of_VACNTs_in_MEMS_devices.pdf; http://irep.iium.edu.my/46212/2/Acceptance_letter.pdf; http://irep.iium.edu.my/46212/3/Speakers_-_World_Congress_on_Microscopy__Instrumentation%2C_Techniques_and_Applications_in_Life_Sciences_and_Materials_Sciences%28WCM_2015%29___.pdf; http://irep.iium.edu.my/46212/; http://www.microscopy.macromol.in/

Vertically aligned Carbon Nanotubes (CNTs) which are commonly referred to as CNT forests, have many potential engineering applications for its attractive mechanical, electrical, optical, and thermal properties. Various micro patterning of VACNTs are used for fabricating MEMS devices such as pressure...