Novel low-voltage RF-MEMS switch: design and simulation

• Main Authors: Ma, Li Ya, Soin, Norhayati, Nordin, Anis Nurashikin
• Format: Conference or Workshop Item
• Language: English; English
• Published: Institute of Electrical and Electronics Engineers Inc. 2014
• Subjects: T Technology (General)
• Online Access: http://irep.iium.edu.my/39111/1/39111_Novel%20low-voltage%20RF-MEMS%20switch.pdf; http://irep.iium.edu.my/39111/2/39111_Novel%20low-voltage%20RF-MEMS%20switch_SCOPUS.pdf; http://irep.iium.edu.my/39111/; http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6920816&tag=1

This paper presents a novel design of a low-voltage radio frequency (RF) micro-electromechanical system (MEMS) switch with its electro-mechanical and microwave characteristics’ simulation, as well as its virtual fabrication process. The RF-MEMS switch employs a shunt capacitive structure. There are...