Hot embossing and injection molding of three-dimensional microcomponents

• Main Authors: Ali, Mohammad Yeakub, Ngoi, B. K. A., Hung, N. P., Yuan, S., Lee, C.P.
• Format: Conference or Workshop Item
• Language: English
• Published: 2001
• Subjects: TJ Mechanical engineering and machinery; TS Manufactures
• Online Access: http://irep.iium.edu.my/27184/1/064_BSME-ASME_2002_659-664.pdf; http://irep.iium.edu.my/27184/

This paper discusses hot embossing and injection molding microreplication processes for the fabrication of three dimensional (3D) microcomponents. These techniques included specialized tooling and variothermal process control. The microcavities were fabricated by focused ion beam (FIB) sputtering...