Investigation of the effects of machining parameters and air blowing on surface topography in high speed end milling of silicon

Machining of silicon is an expensive affair because its inherent brittleness leads to subsurface crack generation. Research endeavours have therefore focused on ductile mode machining of silicon to obtain crack free machined surfaces with roughness as low as 0.22 μm or even below, hence eliminati...

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Bibliographic Details
Main Authors: Amin, A. K. M. Nurul, Khalid, Noor Syairah, Mohd Nasir, Siti Nurshahida, Arif, Muammer Din
Format: Article
Language:English
Published: Trans Tech Publications, Switzerland 2012
Subjects:
Online Access:http://irep.iium.edu.my/26306/1/AMR.576.11.pdf
http://irep.iium.edu.my/26306/
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