Minimum chip thickness in machining MEMS structure using Tool Based Micromilling
Tool based micromilling is a promising micromanufacturing technology to produce miniaturized features of about 25μm in size frMEMS and Bio-MEMS applications.It is the most flexible and the fastest way to produce complex three dimensional microcomponents including sharp edges with surface finish at a...
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| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2011
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/2558/1/449_IRIIE_2011.pdf http://irep.iium.edu.my/2558/ http://www.iium.edu.my/irie/11/ |
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