Investigation of Microholes Produced by Focused Ion Beam Micromachining
This paper discusses the microfabrication of microholes using focused ion beam and investigation of geometrical integrity of microholes. Different combination of aperture size, probe current, acceleration voltage was applied for micromachining and optimized based on taper angle. Microholes with 3.0...
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Department of Manufacturing and Materials,Kulliyyah of Engineering, IIUM
2010
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my.iium.irep.25172020-10-28T01:33:05Z http://irep.iium.edu.my/2517/ Investigation of Microholes Produced by Focused Ion Beam Micromachining Mohd. Fuad, Nurul Hajar Ali, Mohammad Yeakub TJ Mechanical engineering and machinery TS Manufactures This paper discusses the microfabrication of microholes using focused ion beam and investigation of geometrical integrity of microholes. Different combination of aperture size, probe current, acceleration voltage was applied for micromachining and optimized based on taper angle. Microholes with 3.0 μm of diameter were milled according to the optimized parameter using bitmap mode. The depth range of microholes was 1.0-5.5 μm. The hole‘s depth and taper angle were investigated for characterization. Each of the microholes was cross sectioned for investigation. A relationship of taper angle (θ), depth and aspect ratio were plotted. Low aspect ratio (less than 1) would give the lower taper angle and hence better integrity. Acceleration voltage of 25 kV, probe current of 41.5 pA and aperture size of 4 nm produced lower taper angle for different aspect ratio. Department of Manufacturing and Materials,Kulliyyah of Engineering, IIUM Adesta, Erry Yulian Triblas Yaacob, Iskandar Idris Ali, Mohammad Yeakub Maleque, Md. Abdul Mohamed Ariff, Tasnim Firdaus 2010 Book Chapter PeerReviewed application/pdf en http://irep.iium.edu.my/2517/1/RMC_Book_Chapter_Investigation_uHole.pdf Mohd. Fuad, Nurul Hajar and Ali, Mohammad Yeakub (2010) Investigation of Microholes Produced by Focused Ion Beam Micromachining. In: Materials Processing and Precision Engineering. Series 1 . Department of Manufacturing and Materials,Kulliyyah of Engineering, IIUM, Malaysia, pp. 92-97. |
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TJ Mechanical engineering and machinery TS Manufactures Mohd. Fuad, Nurul Hajar Ali, Mohammad Yeakub Investigation of Microholes Produced by Focused Ion Beam Micromachining |
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This paper discusses the microfabrication of microholes using focused ion beam and investigation of geometrical integrity of microholes. Different combination of aperture size, probe current, acceleration voltage was applied for micromachining and optimized based on taper angle. Microholes with 3.0 μm of diameter were milled according to the optimized parameter using bitmap mode. The depth range of microholes was 1.0-5.5 μm. The hole‘s depth and taper angle were investigated for characterization. Each of the microholes was cross sectioned for investigation. A relationship of taper angle (θ), depth and aspect ratio were plotted. Low aspect ratio (less than 1) would give the lower taper angle and hence better integrity. Acceleration voltage of 25 kV, probe current of 41.5 pA and aperture size of 4 nm produced lower taper angle for different aspect ratio. |
author2 |
Adesta, Erry Yulian Triblas |
author_facet |
Adesta, Erry Yulian Triblas Mohd. Fuad, Nurul Hajar Ali, Mohammad Yeakub |
format |
Book Chapter |
author |
Mohd. Fuad, Nurul Hajar Ali, Mohammad Yeakub |
author_sort |
Mohd. Fuad, Nurul Hajar |
title |
Investigation of Microholes Produced by Focused Ion Beam Micromachining |
title_short |
Investigation of Microholes Produced by Focused Ion Beam Micromachining |
title_full |
Investigation of Microholes Produced by Focused Ion Beam Micromachining |
title_fullStr |
Investigation of Microholes Produced by Focused Ion Beam Micromachining |
title_full_unstemmed |
Investigation of Microholes Produced by Focused Ion Beam Micromachining |
title_sort |
investigation of microholes produced by focused ion beam micromachining |
publisher |
Department of Manufacturing and Materials,Kulliyyah of Engineering, IIUM |
publishDate |
2010 |
url |
http://irep.iium.edu.my/2517/1/RMC_Book_Chapter_Investigation_uHole.pdf http://irep.iium.edu.my/2517/ |
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1683230269629267968 |
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13.18916 |