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Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon

Silicon has been widely used in different branches of industrial engineering. Most application of silicon is in computer parts or hardware especially for the production of integrated circuit (IC) chips. Machining of silicon is a big challenge and expensive affair because of it inherent brittlene...

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Main Authors: Amin, A. K. M. Nurul, Patwari, Muhammed Anayet Ullah, M., Dali, M.I., Musa
Format: Conference or Workshop Item
Language:English
Published: 2010
Subjects:
TP Chemical technology
Online Access:http://irep.iium.edu.my/23056/1/p130.pdf
http://irep.iium.edu.my/23056/
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spelling my.iium.irep.230562013-06-18T04:28:02Z http://irep.iium.edu.my/23056/ Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon Amin, A. K. M. Nurul Patwari, Muhammed Anayet Ullah M., Dali M.I., Musa TP Chemical technology Silicon has been widely used in different branches of industrial engineering. Most application of silicon is in computer parts or hardware especially for the production of integrated circuit (IC) chips. Machining of silicon is a big challenge and expensive affair because of it inherent brittleness which is a major limitation as the process of removing the material can generate subsurface damage. Silicon is conventionally finished using grinding followed by polishing and lapping to achieve required surface finish and surface integrity... 2010 Conference or Workshop Item REM application/pdf en http://irep.iium.edu.my/23056/1/p130.pdf Amin, A. K. M. Nurul and Patwari, Muhammed Anayet Ullah and M., Dali and M.I., Musa (2010) Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon. In: IIUM Research, Innovation & Invention Exhibition (IRIIE 2010), 26 - 27 January 2010, Kuala Lumpur. http://www.iium.edu.my/irie/10/sub10/author/list_p.php
institution Universiti Islam Antarabangsa Malaysia
building IIUM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider International Islamic University Malaysia
content_source IIUM Repository (IREP)
url_provider http://irep.iium.edu.my/
language English
topic TP Chemical technology
spellingShingle TP Chemical technology
Amin, A. K. M. Nurul
Patwari, Muhammed Anayet Ullah
M., Dali
M.I., Musa
Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon
description Silicon has been widely used in different branches of industrial engineering. Most application of silicon is in computer parts or hardware especially for the production of integrated circuit (IC) chips. Machining of silicon is a big challenge and expensive affair because of it inherent brittleness which is a major limitation as the process of removing the material can generate subsurface damage. Silicon is conventionally finished using grinding followed by polishing and lapping to achieve required surface finish and surface integrity...
format Conference or Workshop Item
author Amin, A. K. M. Nurul
Patwari, Muhammed Anayet Ullah
M., Dali
M.I., Musa
author_facet Amin, A. K. M. Nurul
Patwari, Muhammed Anayet Ullah
M., Dali
M.I., Musa
author_sort Amin, A. K. M. Nurul
title Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon
title_short Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon
title_full Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon
title_fullStr Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon
title_full_unstemmed Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon
title_sort development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon
publishDate 2010
url http://irep.iium.edu.my/23056/1/p130.pdf
http://irep.iium.edu.my/23056/
http://www.iium.edu.my/irie/10/sub10/author/list_p.php
_version_ 1643608510222565376
score 13.18916

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