Fabrication and characterization of sub polymeric microring resonators for biosensors
In this paper, SU8 polymer was used to fabricate a waveguide and microring resonator for optical biosensing applications in biological (aqueous) media (e.g. to measure protein or DNA interactions). Fabrication steps and results obtained by using UV photolithography at 2μm gap and electron beam litho...
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| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2009
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/12513/1/Full_paper_PGBiomed09_MHSkpt.pdf http://irep.iium.edu.my/12513/ |
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| Summary: | In this paper, SU8 polymer was used to fabricate a waveguide and microring resonator for optical biosensing applications in biological (aqueous) media (e.g. to measure protein or DNA interactions). Fabrication steps and results obtained by using UV photolithography at 2μm gap and electron beam lithography showing the fabrication of microring with 200μm of radius with a 200nm critical coupling gap are presented. Characterization of the SU8 waveguide including propagation and bending losses was performed by using HeNe laser 632.8 nm of wavelengths. Future work on microring resonator characterization and optimisation, including optimisation of the Q factor, resonance wavelength shift using visible wavelength are currently in progress. |
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