Design and simulation of MEMS thermal actuator

• Main Authors: Ismail, Mohd Hafiz, Yeow, Wong Sean, Taib, Bibi Nadia, Johari, Shazlina, Ibrahim, Siti Noorjannah, Aris, Hasnizah
• Format: Proceeding Paper
• Language: English; English
• Published: IEEE 2024
• Subjects: T10.5 Communication of technical information
• Online Access: http://irep.iium.edu.my/118400/8/118400_%20Design%20and%20simulation%20of%20MEMS.pdf; http://irep.iium.edu.my/118400/9/118400_%20Design%20and%20simulation%20of%20MEMS%20_Scopus.pdf; http://irep.iium.edu.my/118400/; https://ieeexplore.ieee.org/document/10729936; https://doi.org/10.1109/ICoCET63343.2024.10729936

This research aims to compare the performance of MEMS electro-thermal actuators with different mechanisms and materials, under similar dimension and boundary conditions. The geometries for the mechanisms mentioned are designed using ANSYS SpaceClaim, whereas the simulation of the actuators is comple...