Design and Simulation of a Readout Circuit for Capacitive Sensing in CMOS-MEMS Devices

• Main Author: Abdul Rahman, Ahmad Jazli
• Format: Final Year Project
• Language: English
• Published: IRC 2015
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://utpedia.utp.edu.my/15586/1/Design%20and%20Simulation%20of%20a%20Readout%20Circuit%20for%20Capacitive%20Sensing%20in%20CMOS_Dissertation.pdf; http://utpedia.utp.edu.my/15586/

Many electronic devices have started to pay attention to CMOS-MEMS technology which provides many advantages. Mostly used in accelerometer and gyroscopes, CMOS-MEMS provides a lot of challenges including the sensing of the output signal. While the signal is about femto- (10-15) to atto- (10-18) fara...