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Simulation of 3D wafer surface reconstruction by wavefront sensing methods

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Bibliographic Details
Main Author: Ng, Yong Han
Format: Final Year Project / Dissertation / Thesis
Published: 2013
Subjects:
TK Electrical engineering. Electronics Nuclear engineering
Online Access:http://eprints.utar.edu.my/1493/1/ESA%2D2014%2D1101666%2D1.pdf
http://eprints.utar.edu.my/1493/
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spelling my-utar-eprints.14932017-08-14T03:20:06Z Simulation of 3D wafer surface reconstruction by wavefront sensing methods Ng, Yong Han TK Electrical engineering. Electronics Nuclear engineering 2013-08 Final Year Project / Dissertation / Thesis NonPeerReviewed application/pdf http://eprints.utar.edu.my/1493/1/ESA%2D2014%2D1101666%2D1.pdf Ng, Yong Han (2013) Simulation of 3D wafer surface reconstruction by wavefront sensing methods. Master dissertation/thesis, UTAR. http://eprints.utar.edu.my/1493/
institution Universiti Tunku Abdul Rahman
building UTAR Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Tunku Abdul Rahman
content_source UTAR Institutional Repository
url_provider http://eprints.utar.edu.my
topic TK Electrical engineering. Electronics Nuclear engineering
spellingShingle TK Electrical engineering. Electronics Nuclear engineering
Ng, Yong Han
Simulation of 3D wafer surface reconstruction by wavefront sensing methods
format Final Year Project / Dissertation / Thesis
author Ng, Yong Han
author_facet Ng, Yong Han
author_sort Ng, Yong Han
title Simulation of 3D wafer surface reconstruction by wavefront sensing methods
title_short Simulation of 3D wafer surface reconstruction by wavefront sensing methods
title_full Simulation of 3D wafer surface reconstruction by wavefront sensing methods
title_fullStr Simulation of 3D wafer surface reconstruction by wavefront sensing methods
title_full_unstemmed Simulation of 3D wafer surface reconstruction by wavefront sensing methods
title_sort simulation of 3d wafer surface reconstruction by wavefront sensing methods
publishDate 2013
url http://eprints.utar.edu.my/1493/1/ESA%2D2014%2D1101666%2D1.pdf
http://eprints.utar.edu.my/1493/
_version_ 1646030700006080512
score 13.160551

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