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Kesan halaju putaran gilapan terhadap peratus potongan hujung sisi pandu gelombang polimer SU-8 di atas substrat silikon

This research have focused on polishing characterize of polymer based waveguides. The aims of this research are to study how polishing rotation speeds affect the length of cut end face SU-8 polymer on silicon substrate. There are seven sets of rotation velocities which are 50, 100, 150, 200, 250, 30...

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Main Authors: Mohammad Syuhaimi Ab Rahman,, Fazlinda Ab Aziz,, Noor Azie Azura Mohd Arif,, Abang Anuar,
Format: Article
Language:English
Published: 2009
Online Access:http://journalarticle.ukm.my/294/1/jurnal_pdf.pdf
http://journalarticle.ukm.my/294/
http://www.ukm.my/jkukm/index.php/jkukm
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spelling my-ukm.journal.2942016-12-14T06:26:57Z http://journalarticle.ukm.my/294/ Kesan halaju putaran gilapan terhadap peratus potongan hujung sisi pandu gelombang polimer SU-8 di atas substrat silikon Mohammad Syuhaimi Ab Rahman, Fazlinda Ab Aziz, Noor Azie Azura Mohd Arif, Abang Anuar, This research have focused on polishing characterize of polymer based waveguides. The aims of this research are to study how polishing rotation speeds affect the length of cut end face SU-8 polymer on silicon substrate. There are seven sets of rotation velocities which are 50, 100, 150, 200, 250, 300, and 350 rpm. From the obtained result, it can be concluded that percentage of cut length for each rotation velocity is ≤ 0.5 % (50 rpm), 0.6 – 1.0 % (100 rpm), 3.8 – 4.8 % (150 rpm), 7.7 – 10.6 % (200 rpm), 15.7 – 18.3% (250 rpm), 25.6 – 27.4 % (300rpm) and 40.0 – 43.7 % (350 rpm). 2009 Article PeerReviewed application/pdf en http://journalarticle.ukm.my/294/1/jurnal_pdf.pdf Mohammad Syuhaimi Ab Rahman, and Fazlinda Ab Aziz, and Noor Azie Azura Mohd Arif, and Abang Anuar, (2009) Kesan halaju putaran gilapan terhadap peratus potongan hujung sisi pandu gelombang polimer SU-8 di atas substrat silikon. Jurnal Kejuruteraan, 21 . pp. 107-116. http://www.ukm.my/jkukm/index.php/jkukm
institution Universiti Kebangsaan Malaysia
building Perpustakaan Tun Sri Lanang Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Kebangsaan Malaysia
content_source UKM Journal Article Repository
url_provider http://journalarticle.ukm.my/
language English
description This research have focused on polishing characterize of polymer based waveguides. The aims of this research are to study how polishing rotation speeds affect the length of cut end face SU-8 polymer on silicon substrate. There are seven sets of rotation velocities which are 50, 100, 150, 200, 250, 300, and 350 rpm. From the obtained result, it can be concluded that percentage of cut length for each rotation velocity is ≤ 0.5 % (50 rpm), 0.6 – 1.0 % (100 rpm), 3.8 – 4.8 % (150 rpm), 7.7 – 10.6 % (200 rpm), 15.7 – 18.3% (250 rpm), 25.6 – 27.4 % (300rpm) and 40.0 – 43.7 % (350 rpm).
format Article
author Mohammad Syuhaimi Ab Rahman,
Fazlinda Ab Aziz,
Noor Azie Azura Mohd Arif,
Abang Anuar,
spellingShingle Mohammad Syuhaimi Ab Rahman,
Fazlinda Ab Aziz,
Noor Azie Azura Mohd Arif,
Abang Anuar,
Kesan halaju putaran gilapan terhadap peratus potongan hujung sisi pandu gelombang polimer SU-8 di atas substrat silikon
author_facet Mohammad Syuhaimi Ab Rahman,
Fazlinda Ab Aziz,
Noor Azie Azura Mohd Arif,
Abang Anuar,
author_sort Mohammad Syuhaimi Ab Rahman,
title Kesan halaju putaran gilapan terhadap peratus potongan hujung sisi pandu gelombang polimer SU-8 di atas substrat silikon
title_short Kesan halaju putaran gilapan terhadap peratus potongan hujung sisi pandu gelombang polimer SU-8 di atas substrat silikon
title_full Kesan halaju putaran gilapan terhadap peratus potongan hujung sisi pandu gelombang polimer SU-8 di atas substrat silikon
title_fullStr Kesan halaju putaran gilapan terhadap peratus potongan hujung sisi pandu gelombang polimer SU-8 di atas substrat silikon
title_full_unstemmed Kesan halaju putaran gilapan terhadap peratus potongan hujung sisi pandu gelombang polimer SU-8 di atas substrat silikon
title_sort kesan halaju putaran gilapan terhadap peratus potongan hujung sisi pandu gelombang polimer su-8 di atas substrat silikon
publishDate 2009
url http://journalarticle.ukm.my/294/1/jurnal_pdf.pdf
http://journalarticle.ukm.my/294/
http://www.ukm.my/jkukm/index.php/jkukm
_version_ 1643734665918414848
score 13.211869

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