Optical constants and electronic transition in hydrogenated silicon (Si:H) thin films deposited by layer-by-layer (LBL) deposition technique

• Main Authors: Goh, Boon Tong, Muhamad Rasat Muhamad,, Saadah Abdul Rahman,
• Format: Article
• Language: English
• Published: Universiti Kebangsaan Malaysia 2011
• Online Access: http://journalarticle.ukm.my/2448/1/13_Goh.pdf; http://journalarticle.ukm.my/2448/; http://www.ukm.my/jsm/

Optical constants derived from optical transmission (T) and reflectance (R) spectra in the wavelength range of 220 to 2200 nm are presented in this paper for hydrogenated silicon (Si:H) thin films deposited by plasma enhanced chemical vapor deposition (PECVD) using the layer-by-layer (LBL) depositio...