Image reversal resist photolithography of silicon-based platinum and silver microelectrode pattern

• Main Authors: Nurulhaidah Daud,, Nor Farhah Razak,, Normahirah Nek Abd Rahman,, Azizah Mohd Zahidi,, Chin, Siew Xian, Tengku Elmi Azlina Tengku Muda,
• Format: Article
• Language: English
• Published: Penerbit Universiti Kebangsaan Malaysia 2021
• Online Access: http://journalarticle.ukm.my/16509/1/22.pdf; http://journalarticle.ukm.my/16509/; https://www.ukm.my/jsm/malay_journals/jilid50bil2_2021/KandunganJilid50Bil2_2021.html

Silicon-based platinum (Pt) and silver (Ag) microelectrodes are constructed using photolithography technique and used in detecting arsenic activity in different electrolytes. Pt and Ag have good properties either as a working, a counter, or a reference electrode due to their low electrical resistanc...