Effects of edge cracks on the dynamics of piezoelectric cantilever based MEMS sensor
This paper presents edge crack fault modeling for piezoelectric cantilever based MEMS sensor using LTI (linear time invariant) technique. Frequency fault model is developed to analyze the dynamic behavior of the device in term of displacement, frequency and output electrical response. First an analy...
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| Main Authors: | , , , |
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| Format: | Article |
| Published: |
Institute of Electrical and Electronics Engineers Inc.
2017
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| Online Access: | http://scholars.utp.edu.my/id/eprint/20203/ https://www.scopus.com/inward/record.uri?eid=2-s2.0-85012031841&doi=10.1109%2fICIAS.2016.7824083&partnerID=40&md5=5a14a5995838390ffefc46b25d78bd9b |
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