Agent-based chemical mechanical planarization qualification for semiconductor wafer fabrication

Semiconductor wafer fabrication is one of the critical segments in overall integrated circuit (IC) production flow. There are number of processes involved in the wafer fabrication facility which are diffusion, ion implantation, lithography, etching and Chemical Mechanical Planarization (CMP). Proces...

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Bibliographic Details

Main Authors:	Md Fauadi, Muhammad Hafidz Fazli, Ramlan, Samad, Razali, N.H., Hao, X.
Format:	Article
Language:	en
Published:	Penerbit Universiti Teknikal Malaysia Melaka 2021
Online Access:	http://eprints.utem.edu.my/id/eprint/25828/2/AGENT%20JAMT-COMPRESSED.PDF http://eprints.utem.edu.my/id/eprint/25828/ https://jamt.utem.edu.my/jamt/article/view/6219/3972
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