Agent-based chemical mechanical planarization qualification for semiconductor wafer fabrication
Semiconductor wafer fabrication is one of the critical segments in overall integrated circuit (IC) production flow. There are number of processes involved in the wafer fabrication facility which are diffusion, ion implantation, lithography, etching and Chemical Mechanical Planarization (CMP). Proces...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | en |
| Published: |
Penerbit Universiti Teknikal Malaysia Melaka
2021
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| Online Access: | http://eprints.utem.edu.my/id/eprint/25828/2/AGENT%20JAMT-COMPRESSED.PDF http://eprints.utem.edu.my/id/eprint/25828/ https://jamt.utem.edu.my/jamt/article/view/6219/3972 |
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