Effect of deposition regime transition on the properties of Al:ZnO transparent conducting oxide layer by radio frequency magnetron sputtering system

High-quality zinc oxide thin films doped with aluminium adatoms have effectively been fabricated on pristine soda-lime silica glass substrates via radio frequency magnetron sputtering system. The deposition temperature was varied to explore the impact of deposition regime transition of as-deposited...

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Bibliographic Details
Main Authors:	Abd Rahman M.N., Zuhdi A.W.M., Amirulddin U.A.U., Isah M., Azman N.I., Arsad A.Z., Arzaee N.A., Mansor M., Shuhaimi A.
Other Authors:	57102327000
Format:	Article
Published:	Elsevier Ltd 2025
Subjects:	Aluminum coatings Conductive films Crystal atomic structure Crystal lattices Descaling Hard facing Magnetron sputtering Transparent conducting oxides X ray diffraction analysis Zinc oxide Aluminum zinc oxides Aluminum-doped zinc oxide thin films Deposition regime transition Deposition regimes Energy Kinetic limited regime Lateral deposition Regime transition Thermodynamic limited regime Vertical depositions Crystal orientation
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Effect of deposition regime transition on the properties of Al:ZnO transparent conducting oxide layer by radio frequency magnetron sputtering system

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