MOS Transistor Mask Design Using SEM Based E-Beam Lithography

Prof. Dr. Uda Hashim and his team won silver for MOS Transistor Mask Design Using SEM Based E-Beam Lithography at ITEX 2006, 19th - 21st May 2006 at Kuala Lumpur Convention Centre (KLCC), Kuala Lumpur.

Bibliographic Details

Main Authors:	Uda, Hashim, Prof. Dr., Nur Hamidah, Abdul Halim, Mohammad Nuzaihan, Md Nor, Zul Azhar, Zahid Jamal, Prof. Dr.
Other Authors:	uda@kukum.edu.my
Format:	Image
Language:	en
Published:	Malaysian Invention & Design Society (MINDS) 2010
Subjects:	E-Beam Lithography (EBL) MOS Transistor Mask Design KUKUM > Research International Invention, Innovation & Technology Exhibition ITEX 2006
Online Access:	http://dspace.unimap.edu.my/123456789/8345
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