Borophosphosilicate glass (BPSG) reflow characterization for submicron CMOS technology

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Bibliographic Details
Main Authors:	Uda, Hashim, Ramzan, Mat Ayub, Nik Hazura, Nik Hamat
Format:	Article
Language:	en
Published:	Universiti Kebangsaan Malaysia 2009
Subjects:	Borophosphosilicate glass Hydrofluoric acid staining Steam annealing Microelectronics > Materials Integrated circuits > Materials Metal oxide semiconductors, Complementary
Online Access:	http://dspace.unimap.edu.my/123456789/6889
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