Shallow junction formation: A simulation based study of thermal diffusion by spin-on-dopants technique

Shallow junction formation: A simulation based study of thermal diffusion by spin-on-dopants technique

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Bibliographic Details
Main Authors: Uda, Hashim, Prof. Dr., Tijjani Adam, Shuwa, Nik Hazura, Nik Hamat, Siti Fatimah
Other Authors: uda@unimap.edu.my
Format: Article
Language:en
Published: AENSI Publications 2013
Subjects:
Ultra shallow junction
Simulation
TSUPREM-4
Thermal diffusion
Semiconductor
Online Access:http://dspace.unimap.edu.my/123456789/26528
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