Effects of hydrogen and helium dilution on the optical band gap and photoluminescence of DC PECVD hydrogenated amorphous carbon films
A series of hydrogenated amorphous carbon (a-C:H) thin films were deposited using home-built direct-current (DC) plasma enhanced chemical vapour deposition (PECVD) system. The a-C:H thin films were deposited using pure methane (CH 4) gas diluted either with hydrogen (H) or helium (He). The effects o...
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| Format: | Article |
| Published: |
Penerbit Universiti Kebangsaan Malaysia
2008
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| Online Access: | http://eprints.um.edu.my/7346/ |
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