Physical and dispersive optical characteristics of ZrON/Si thin-film system
To date, the complex evaluation of physical and dispersive optical characteristics of the ZrON/Si film system has yet been reported. Hence, ZrON thin films have been formed on Si(100) substrates through oxidation/nitridation of sputtered metallic Zr in N2O environment at 500, 700, and 900 ∘C. Physic...
Saved in:
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Published: |
Springer
2014
|
| Subjects: | |
| Online Access: | http://eprints.um.edu.my/13018/ https://doi.org/10.1007/s00339-013-7947-1 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|