Investigation of optical and structural properties of ion-assisted deposition (IAD) ZrO2 thin films
Zirconium dioxide thin films were deposited onto fused silica glass substrates by electron-beam assisted by oxygen ions using high vacuum coater equipped with electron beam gun at ambient substrate temperature. The properties of the films have been investigated using X-ray diffraction (XRD), X-ray p...
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| Main Authors: | , , |
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| Format: | Article |
| Published: |
Springer Verlag (Germany)
2013
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| Subjects: | |
| Online Access: | http://eprints.um.edu.my/11819/ http://link.springer.com/article/10.1007%2Fs12541-013-0271-z http://doi.org/10.1007/s12541-013-0271-z |
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