Synthesis and characterization of Ta/TaN coatings with CFUBMS-HiPIMS technology

The aim of this work is to study the mechanical and tribological behavior of Ta/TaN coated 52,100 tool steel. Ta/TaN thin film have been deposited by CFUBMS-HiPIMS method. In the early 2000s, it started to show itself in R&D studies with the technological developments in electronic power d...

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Bibliographic Details

Main Authors:	Polat, Muhammed Alperen, Gülten, Gökhan, Totik, Ya¸sar, Maleque, Md. Abdul, Haji Hassan, Masjuki, Yusuf Çetin, Safa, Efeoglu, Ihsan
Format:	Proceeding Paper
Language:	en en
Published:	Springer Nature 2023
Subjects:	T173.2 Technological change TN600 Metallurgy TP200 Manufacture and use of chemicals TS200 Metal manufactures. Metalworking
Online Access:	http://irep.iium.edu.my/104764/2/104764_Synthesis%20and%20Characterization.pdf http://irep.iium.edu.my/104764/8/104764_Synthesis%20and%20characterization_SCOPUS.pdf http://irep.iium.edu.my/104764/ https://link.springer.com/chapter/10.1007/978-981-19-9509-5_37
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