3D CFD Simulations of MOCVD Synthesis System of Titanium Dioxide Nanoparticles

• 主要な著者: Othman, Siti Hajar, Abdul Rashid, Suraya, Abdullah, Norhafizah, Mohd Ghazi, Tinia Idaty
• フォーマット: 論文
• 出版事項: 2013
• オンライン･アクセス: http://psasir.upm.edu.my/id/eprint/28575/; http://dx.doi.org/10.1155/2013/123256

This paper presents the 3-dimensional (3D) computational fluid dynamics (CFD) simulation study of metal organic chemical vapor deposition (MOCVD) producing photocatalytic titanium dioxide (TiO2) nanoparticles. It aims to provide better understanding of the MOCVD synthesis system especially of deposi...