The surface characteristics of under bump metallurgy (UBM) in electroless nickel immersion gold (ENIG) deposition

• Main Authors: Arshad, M.K.M., Ahmad, I., Jalar, A., Omar, G.
• 出版: 2017
• 在线阅读: http://dspace.uniten.edu.my:8080/jspui/handle/123456789/5320

This paper discusses on the surface characteristics of each of the seven set-up process steps prior completion of under bump metallurgy (UBM) deposition. The Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM) techniques were used to obtain the surface roughness and morphology of ea...