Fabrication of MEMS piezoresistive accelerometer for human gait analysis using laser micromachining

• 主要作者: Ahmad Fitri, Anuar Mahayudin
• 其他作者: Yufridin, Wahab, Prof. Dr.
• 格式: Thesis
• 语言: English
• 出版: Universiti Malaysia Perlis (UniMAP) 2017
• 主题: Gait in humans; Microelectromechanical systems; Accelerometers; Micromachining
• 在线阅读: http://dspace.unimap.edu.my:80/xmlui/handle/123456789/76676

Master of Science in Microelectronic Engineering