Fabrication Of 50 µm transistor and AlNiAu interconnection process

• 主要作者: Shaffie Husin
• 其他作者: Mohd Khairuddin Md Arshad (Advisor)
• 格式: Learning Object
• 语言: English
• 出版: Universiti Malaysia Perlis 2008
• 主题: Transistors; Silicon; Negative metal oxide semiconductors (NMOS); Metal Oxide Semiconductor Field Effect Transistor (MOSFET); Transistors > Design and construction; Silicon oxidation; Transistor circuits
• 在线阅读: http://dspace.unimap.edu.my/xmlui/handle/123456789/1938

Generally process fabrication transistor will starts by cleaning the wafer, formation region drain, D and source, S, get oxide and deposited aluminum as contact with the source, drain and gate. Mask is very important thing to develop the pattern transfer in fabrication process Based on that, the pro...