Feasibility Study of Wafer Scale Laser Assisted Thermal Imprinting of Glass Nanostructures

• Main Authors: Lee, Helen, Syarifah Nur Hasanah, Syed Kamarudin, Ismayuzri, Ishak, Ahmad Rosli, Abdul Manaf, Ahmad Shahir, Jamaludin, Mohd Ali Hanafiah, Shaharudin, Mohd Zairulnizam, Mohd Zawawi
• 格式: Conference or Workshop Item
• 语言: English
• 出版: Springer, Singapore 2021
• 主题: TS Manufactures
• 在线阅读: http://umpir.ump.edu.my/id/eprint/36984/1/Feasibility%20Study%20of%20Wafer%20Scale%20Laser%20Assisted.pdf; http://umpir.ump.edu.my/id/eprint/36984/; https://doi.org/10.1007/978-981-15-9505-9_80

Major challenges for any direct nanostructuring method on glass substrate is the difficulty to scale up the patterning area to industrial scale. In this work, a rapid and large area direct thermal imprinting of glass nanostructures using silicon mold assisted by CO2 laser irradiation was demonstrate...