Feasibility Study of Wafer Scale Laser Assisted Thermal Imprinting of Glass Nanostructures
Major challenges for any direct nanostructuring method on glass substrate is the difficulty to scale up the patterning area to industrial scale. In this work, a rapid and large area direct thermal imprinting of glass nanostructures using silicon mold assisted by CO2 laser irradiation was demonstrate...
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主要な著者: | , , , , , , |
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フォーマット: | Conference or Workshop Item |
言語: | English |
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Springer, Singapore
2021
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オンライン・アクセス: | http://umpir.ump.edu.my/id/eprint/36984/1/Feasibility%20Study%20of%20Wafer%20Scale%20Laser%20Assisted.pdf http://umpir.ump.edu.my/id/eprint/36984/ https://doi.org/10.1007/978-981-15-9505-9_80 |
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