Effect of substrate temperature on the properties of diamond-like carbon deposited by PECVD in methane atmosphere
Diamond-like carbon thin films were prepared at different substrate temperatures by using DC·PECVD at 1x10·1Torr in methane atmosphere. The DC-PECVD system was reconstructed for gelling higher substrate temperature up to 560°C. Raman spectroscopy has been used to study the effect of chemical bonding...
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| Language: | en |
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2006
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| Online Access: | http://eprints.utm.my/9303/1/SurianySarmid2006_EffectofSubemperatureontheProperties.pdf http://eprints.utm.my/9303/ |
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| author | Sarmid, Suriany Oeraman, Karim Ismail, Bakar Sakrani, Samsudi |
| author_facet | Sarmid, Suriany Oeraman, Karim Ismail, Bakar Sakrani, Samsudi |
| author_sort | Sarmid, Suriany |
| building | UTM Library |
| collection | Institutional Repository |
| content_provider | Universiti Teknologi Malaysia |
| content_source | UTM Institutional Repository |
| continent | Asia |
| country | Malaysia |
| description | Diamond-like carbon thin films were prepared at different substrate temperatures by using DC·PECVD at 1x10·1Torr in methane atmosphere. The DC-PECVD system was reconstructed for gelling higher substrate temperature up to 560°C. Raman spectroscopy has been used to study the effect of chemical bonding of the films and the deposition rate is studied too. The deposition rate is decreased with the increasing substrate temperature. The Raman main band is due to the lattice vibration of Sp2 bonded carbon atoms (graphite band or G band). If the size of the graphite domains decrease. a low frequencies modulation corresponding to the disorder zone of graphite that corresponding to D peak. The Sp3 bonded carbon increased as the substrate temperature increase from 27°C to 200°C. The result also showed that loIlG ratio decreased with increasing amount of Sp3 fraction as the temperature is increased up to 200°C. |
| format | Conference or Workshop Item |
| id | my.utm.eprints-9303 |
| institution | Universiti Teknologi Malaysia |
| language | en |
| publishDate | 2006 |
| record_format | eprints |
| spelling | my.utm.eprints-93032017-08-27T00:26:37Z http://eprints.utm.my/9303/ Effect of substrate temperature on the properties of diamond-like carbon deposited by PECVD in methane atmosphere Sarmid, Suriany Oeraman, Karim Ismail, Bakar Sakrani, Samsudi QC Physics Diamond-like carbon thin films were prepared at different substrate temperatures by using DC·PECVD at 1x10·1Torr in methane atmosphere. The DC-PECVD system was reconstructed for gelling higher substrate temperature up to 560°C. Raman spectroscopy has been used to study the effect of chemical bonding of the films and the deposition rate is studied too. The deposition rate is decreased with the increasing substrate temperature. The Raman main band is due to the lattice vibration of Sp2 bonded carbon atoms (graphite band or G band). If the size of the graphite domains decrease. a low frequencies modulation corresponding to the disorder zone of graphite that corresponding to D peak. The Sp3 bonded carbon increased as the substrate temperature increase from 27°C to 200°C. The result also showed that loIlG ratio decreased with increasing amount of Sp3 fraction as the temperature is increased up to 200°C. 2006-06 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.utm.my/9303/1/SurianySarmid2006_EffectofSubemperatureontheProperties.pdf Sarmid, Suriany and Oeraman, Karim and Ismail, Bakar and Sakrani, Samsudi (2006) Effect of substrate temperature on the properties of diamond-like carbon deposited by PECVD in methane atmosphere. In: Proceedings of Annual Fundamental Science Seminar 2006 (AFSS 2006), 6th - 7th June 2006, Universiti Teknologi Malaysia, Skudai, Malaysia. |
| spellingShingle | QC Physics Sarmid, Suriany Oeraman, Karim Ismail, Bakar Sakrani, Samsudi Effect of substrate temperature on the properties of diamond-like carbon deposited by PECVD in methane atmosphere |
| title | Effect of substrate temperature on the properties of diamond-like carbon deposited by PECVD in methane atmosphere |
| title_full | Effect of substrate temperature on the properties of diamond-like carbon deposited by PECVD in methane atmosphere |
| title_fullStr | Effect of substrate temperature on the properties of diamond-like carbon deposited by PECVD in methane atmosphere |
| title_full_unstemmed | Effect of substrate temperature on the properties of diamond-like carbon deposited by PECVD in methane atmosphere |
| title_short | Effect of substrate temperature on the properties of diamond-like carbon deposited by PECVD in methane atmosphere |
| title_sort | effect of substrate temperature on the properties of diamond-like carbon deposited by pecvd in methane atmosphere |
| topic | QC Physics |
| url | http://eprints.utm.my/9303/1/SurianySarmid2006_EffectofSubemperatureontheProperties.pdf http://eprints.utm.my/9303/ |
| url_provider | http://eprints.utm.my/ |