APA (7th ed.) Citation

Abd Samad, M. I., Mohd Noor, M., Nayan, N., Abu Bakar, A. S., Mansor, M., Mahmood Zuhdi, A. W., . . . Latif, R. (2023). Effects of argon/nitrogen sputtering gas on the microstructural, crystallographic and piezoelectric properties of AlN thin films. Elsevier.

Chicago Style (17th ed.) Citation

Abd Samad, Muhammad Izzuddin, Mimiwaty Mohd Noor, Nafarizal Nayan, Ahmad Shuhaimi Abu Bakar, Marwan Mansor, Ahmad Wafi Mahmood Zuhdi, Azrul Azlan Hamzah, and Rhonira Latif. Effects of Argon/nitrogen Sputtering Gas on the Microstructural, Crystallographic and Piezoelectric Properties of AlN Thin Films. Elsevier, 2023.

MLA (9th ed.) Citation

Abd Samad, Muhammad Izzuddin, et al. Effects of Argon/nitrogen Sputtering Gas on the Microstructural, Crystallographic and Piezoelectric Properties of AlN Thin Films. Elsevier, 2023.