Effect of in SITU DC and PDC substrate bias cleaning process on TiN coating adhesion in PVD system

This research compared the effect ofPDC and DC substrate biases applications at -500V and study the effect of PDC voltage variations (OV, -200V, -500V, -800V) during substrate cleaning on coating adhesion. The substrate and coating materials used were tungsten carbide(WC) and titanium nitride (TiN),...

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Bibliographic Details

Main Author:	Hanizam , Hashim
Format:	Thesis
Language:	en
Published:	2013
Subjects:	TJ Mechanical engineering and machinery
Online Access:	http://eprints.utem.edu.my/id/eprint/15744/1/Effect%20of%20in%20SITU%20DC%20and%20PDC%20substrate%20bias%20cleaning%20process%20on%20TiN%20coating%20adhesion%20in%20PVD%20system006%2824%29.pdf http://eprints.utem.edu.my/id/eprint/15744/ http://library.utem.edu.my:8000/elmu/index.jsp?module=webopac-d&action=fullDisplayRetriever.jsp&szMaterialNo=0000085767
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