M.I.A, S., M.M, N., N, N., A.S.A, B., M, M., A.W.M, Z., . . . 57768220600. (2024). Effects of argon/nitrogen sputtering gas on the microstructural, crystallographic and piezoelectric properties of AlN thin films. Acta Materialia Inc.
Chicago Style (17th ed.) CitationM.I.A, Samad, Noor M.M, Nayan N, Bakar A.S.A, Mansor M, Zuhdi A.W.M, Hamzah A.A, Latif R, and 57768220600. Effects of Argon/nitrogen Sputtering Gas on the Microstructural, Crystallographic and Piezoelectric Properties of AlN Thin Films. Acta Materialia Inc, 2024.
MLA (9th ed.) CitationM.I.A, Samad, et al. Effects of Argon/nitrogen Sputtering Gas on the Microstructural, Crystallographic and Piezoelectric Properties of AlN Thin Films. Acta Materialia Inc, 2024.
Warning: These citations may not always be 100% accurate.