High-throughput manufacturing of epitaxial membranes from a single wafer by 2D materials-based layer transfer process

Layer transfer techniques have been extensively explored for semiconductor device fabrication as a path to reduce costs and to form heterogeneously integrated devices. These techniques entail isolating epitaxial layers from an expensive donor wafer to form freestanding membranes. However, current la...

Full description

Saved in:

Bibliographic Details
Main Authors:	Kim H., Liu Y., Lu K., Chang C.S., Sung D., Akl M., Qiao K., Kim K.S., Park B.-I., Zhu M., Suh J.M., Kim J., Jeong J., Baek Y., Ji Y.J., Kang S., Lee S., Han N.M., Kim C., Choi C., Zhang X., Choi H.-K., Zhang Y., Wang H., Kong L., Afeefah N.N., Ansari M.N.M., Park J., Lee K., Yeom G.Y., Kim S., Hwang J., Kong J., Bae S.-H., Shi Y., Hong S., Kong W.
Other Authors:	23395055200
Format:	Article
Published:	Nature Research 2024
Subjects:	Cost reduction Epilayers Etching Membranes Semiconductor devices Substrates Free standing membranes High-throughput Integrated device Layer transfer Layer transfer process Material-based Reduce costs Semiconductor device fabrication Single wafer Transfer technique Article crystal structure degradation desorption epitaxy high throughput analysis layer transfer process molecular dynamics physical phenomena surface property Silicon wafers
Tags:	Add Tag No Tags, Be the first to tag this record!

Be the first to leave a comment!

High-throughput manufacturing of epitaxial membranes from a single wafer by 2D materials-based layer transfer process

Similar Items