Responsivity optimization of a MQW SOI-based lateral PIN photodiode using Taguchi's L27 orthogonal array

Silicon-on-insulator (SOI)-based lateral PIN photodiodes using SiGe/Si multilayer quantum wells (MQW) are suitable for applications in the near-infrared range both for sensing and optical fiber communication application. The objective of this paper is to optimize the process parameters for such a de...

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Bibliographic Details

Main Authors:	Menon P.S., Tasirin S.K., Ahmad I., Abdullah S.F., Apte P.R.
Other Authors:	57201289731
Format:	Conference paper
Published:	2023
Subjects:	L<sub>27</sub> orthogonal array photodiode quantum dot SiGe/Si SOI Taguchi method Photodiodes Semiconductor quantum wells Taguchi methods Fabrication parameters Lateral PIN photodiodes Optimization approach Orthogonal array Silicon-on-insulators Optimization
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