Comparison on various developing method at clean track ACT 8 based on 0.5um CMOS Technology

International Conference on X-Rays and Related Techniques in Research and Industry (ICXRI 2010) jointly organized by Universiti Malaysia Perlis (UniMAP) and X-Ray Application Malaysia Society (XAPP), 9th - 10th June 2010 at Aseania Resort Langkawi, Malaysia.

Bibliographic Details

Main Authors:	Nazrah, Omar, Muhammad Hilmi, Othman, Anifah, Zakaria
Other Authors:	Nazrah@mimos.my
Format:	Working Paper
Language:	en
Published:	Universiti Malaysia Perlis 2010
Subjects:	Developing method CD Sem Wafer Coater Stepper International Conference on X-Rays & Related Techniques in Research & Industry (ICXRI)
Online Access:	http://dspace.unimap.edu.my/123456789/9015
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