Evaluation of the machine learning classifier in wafer defects classification

In this paper, an evaluation of machine learning classifiers to be applied in wafer defect detection is described. The objective is to establish the best machine learning classifier for Wafer Defect Detection application. k-Nearest Neighbours (k-NN), Logistic Regression, Stochastic Gradient Descent,...

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Bibliographic Details

Main Authors:	Jessnor Arif, Mat Jizat, Anwar, P. P. Abdul Majeed, Ahmad Fakhri, Ab. Nasir, Zahari, Taha, Yuen, Edmund
Format:	Article
Language:	en
Published:	Elsevier 2021
Subjects:	TS Manufactures
Online Access:	http://umpir.ump.edu.my/id/eprint/31740/1/Evaluation%20of%20the%20machine%20learning%20classifier%20in%20wafer%20defects%20classification.pdf http://umpir.ump.edu.my/id/eprint/31740/ https://doi.org/10.1016/j.icte.2021.04.007
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