Influence of bias voltage on the optical and structural properties of nc-Si:H films grown by layer-by-layer (LBL) deposition technique

The effects of applying a positive bias of 25 to 100 V on the optical, structural and photoluminescence (PL) properties of hydrogenated nanocrystalline silicon (nc-Si:H) films produced by layer-by-layer (LBL) deposition technique has been studied. Optical characterization of the films has been obtai...

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Bibliographic Details

Main Authors:	Tong, G.B., Gani, S.M.A., Muhamad, M.R., Rahman, S.A.
Format:	Article
Published:	2009
Subjects:	QC Physics
Online Access:	http://eprints.um.edu.my/7360/
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