Effect of annealing on the optical and chemical bonding properties of hydrogenated amorphous carbon and hydrogenated amorphous carbon nitride thin films

Hydrogenated amorphous carbon (a-C:H) and hydrogenated amorphous carbon nitride (a-CN(x):H) films were prepared in a custom-built radio-frequency plasma-enhanced chemical vapor deposition (RF-PECVD) system with a parallel-plate configuration. Pure methane and a gas mixture of methane and nitrogen we...

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Bibliographic Details

Main Authors:	Ritikos, Richard, Chow, Chee Siong, Gani, Siti Meriam Ab, Muhamad, Muhamad Rasat, Rahman, Saadah Abdul
Format:	Article
Published:	IOP Publishing 2009
Subjects:	Q Science (General) QC Physics
Online Access:	http://eprints.um.edu.my/7332/ https://doi.org/10.1143/JJAP.48.101301
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