Thickness and crystalline properties of sputtered polycrystalline silicon thin film deposited on Teflon substrates / Shaiful Bakhtiar Hashim, Norhidayatul Hikmee Mahzan and Sukreen Hana Herman

A Polycrystalline silicon (poly-Si) thin film was successfully deposited on Teflon substrates at a room temperature using radiofrequency (RF) magnetron sputtering. The effects of sputtering pressure on the thickness and crystallinity properties of the thin films have been studied. Raman scattering s...

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Bibliographic Details

Main Authors:	Hashim, Shaiful Bakhtiar, Mahzan, Norhidayatul Hikmee, Herman, Sukreen Hana
Format:	Article
Language:	en
Published:	2017
Subjects:	TK Electrical engineering. Electronics. Nuclear engineering
Online Access:	https://ir.uitm.edu.my/id/eprint/83532/1/83532.pdf https://ir.uitm.edu.my/id/eprint/83532/ https://e-ajuitmct.uitm.edu.my/v3/
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