Structural study of porous Si with different crystal orientation fabricated using two-step alternating current photo-electrochemical etching technique / Fatimah Zulkifli … [et al.]

Two different crystal orientation of n-type Si substrates n(100) and n(111) were used to fabricate porous structure using two-step Alternating Current Photo- Electrochemical (ACPEC) etching technique. This research aims to investigate the difference of porous structure and properties for different o...

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Bibliographic Details

Main Authors:	Zulkifli, Fatimah, Radzali, Rosfariza, Abd Rahim, Alhan Farhanah, Mahmood, Ainorkhilah, Abu Bakar, Aslina
Format:	Article
Language:	en
Published:	Universiti Teknologi MARA 2021
Subjects:	Elementary particle physics Inorganic chemistry Materials of engineering and construction
Online Access:	https://ir.uitm.edu.my/id/eprint/52085/1/52085.pdf https://ir.uitm.edu.my/id/eprint/52085/ https://jeesr.uitm.edu.my/
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