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    Feasibility study of GaN-based MEMS capacitive microphone using finite element method

    Feasibility study of GaN-based MEMS capacitive microphone using finite element method by Rahmat Zaki Auliya, M. F. Mohd. Razip Wee, Subandi, Ayub, Muhammad Ramdzan Buyong, Burhanuddin Yeop Majlis

    Published 2020
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