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    Optimized scratch adhesion for TiSiN coatings deposited by a combination of DC and RF sputtering

    Optimized scratch adhesion for TiSiN coatings deposited by a combination of DC and RF sputtering by Bushroa, Abdul Razak, Masjuki, Haji Hassan, Muhamad, Muhamad Rasat, Beake, B.D.

    Published 2011
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