Search Results - Badaruddin, R.

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    Multi-phase structured hydrogenated amorphous silicon carbon nitride thin films grown by plasma enhanced chemical vapour deposition

    Multi-phase structured hydrogenated amorphous silicon carbon nitride thin films grown by plasma enhanced chemical vapour deposition by Abdul Rahman, M.A., Chiu, W.S., Haw, C.Y., Badaruddin, R., Tehrani, F.S., Rusop, M., Khiew, P., Rahman, S.A.

    Published 2017
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