Description: Optimization of silver-assisted nano-pillar etching process in silicon

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Bibliographic Details
Main Authors:	Ayu Wazira, Azhari, Kamaruzzaman, Sopian, Mohd Khairunaz, Mat Desa, Saleem Hussain, Zaidi
Other Authors:	ayuwazira@unimap.edu.my
Format:	Article
Language:	English
Published:	Elsevier 2016
Subjects:	Box-Behnken design Metal assisted chemical etching Nano-texturing Response surface methodology Si nanostructures
Online Access:	http://dspace.unimap.edu.my:80/xmlui/handle/123456789/41251
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Summary:	Link to publisher's homepage at http://www.journals.elsevier.com/