Description: Probing the Ph measurement of self-alligned polysilicon nanogap capacitor

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Bibliographic Details
Main Authors:	Nazwa, Taib, Uda, Hashim, Prof. Dr., Mohammad Nuzaihan, Md Noor
Other Authors:	nazawa_nice@yahoo.com
Format:	Article
Language:	English
Published:	Trans Tech Publications 2013
Subjects:	Dielectric layer Dielectric properties Nanogap capacitor Ph Thermal oxidation
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/27454
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